1200 ℃ high vacuum tube furnace with sliding rail for rapid annealing

1200℃ high-vacuum rapid annealing furnace

1.Overview
The 1200℃rapid annealing furnace is essentially a set of slideway furnace, which
realizes the functions of heating and annealing. The intake end is equipped with a
high-precision three-way mass flow meter to accurately control the atmosphere in
the tube;At the same time, the equipment is equipped with a turbo molecular pump,
which can quickly achieve a high vacuum environment and maximize the interference
of the air atmosphere to the experiment.
The slideway furnace is composed of 1200℃standard single heating zone tube furnace
and high precision slide rail.Tube furnace adopts resistance wire heating, combined
with polycrystalline fiber furnace chamber, which has excellent temperature rise
and thermal insulation performance. The slide rails are tightly matched, slide
smoothly, and easy to operate. At the same time, it adopts full-color LCD touch
screen operation, which is simple and intuitive, easy to use, can simplify the
experimental operation and save the test time.

2.Technical Parameters
►1200 ℃ Tube furnace
Voltage: AC220V,50Hz
Max power: 4KW
Heating zone: Single zone 440mm
Working temperature: ≤1200℃
Temperature control accuracy: ±1℃
Temperature control method: AI-PID 30-stage process curve, can store multiple
Tube material: High purity quartz
Tube size: φ80mm I.D x 1000mm L
Sealing mode: Stainless steel vacuum flange
Vacuum measurement: Mechanical pressure gauge
Working gas: Non-corrosive gases such as hydrogen, nitrogen, argon, and oxygen

►Three-way mass flowmeter
Valve type: Stainless steel needle valve
Gas channels: Three-way
Pressure range: 0.05~0.3MPa
Range: 0~100 SCCM (H2)/0~200 SCCM（Ar）/0~500 SCCM（CH4）
Flow control range: ±1.5%
Mixing tank volume: 750mL
Gas path material: 304 stainless steel
Pipe interface: 6.35mm Bite type joint
Power supply: AC220V 50Hz

Minimum Order: 1 sets

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