1200 ℃ vacuum CVD machine with MFC for graphene

Chemical vapor deposition (CVD) refers to a method in which chemical gases or steam
react on the surface of a substrate to synthesize coatings or nanomaterials. It is
the most widely used technology in the semiconductor industry to deposit a variety
of materials, including a wide range of insulating materials, Most metal materials
and metal alloy materials.
CY-O1200-50IT-3Z-LV CVD tube furnace consists of a single heating zone tube
furnace, a three-channel mass flow meter and a double stage rotary vane vacuum
pump.
It is suitable for high-temperature sintering, metal annealing, quality inspection,
etc. in universities, research institutes, industrial and mining enterprises,
especially for CVD experiments that require a variety of gas mixing atmospheres.

Vacuum tube furnace Model CY-O1200-50IT
Tube material High purity quartz
Tube diameter 50mm (Optional 60mm,   80mm, 100mm)
Tube length 800mm
Furnace chamber length 440mm
Heating zone length 400mm
Constant temperature zone 200mm
Operating temperature 0～1100℃
Temperature control accuracy ±1℃
Temperature control mode 30 or 50 segment program temperature
control
Display mode LCD
Sealing method 304 stainless steel vacuum flange
Flange interface 1/4" ferrule connector, KF16/25/40 joint
Vacuum 4.4E-3Pa
Power supply AC:220V 50/60Hz
Gas supply system Model CY-3Z
Gas channel 3-channel
Measuring unit Gas mass flowmeter
Measuring range A channel: 0～100SCCM H2 gas Remarks: If you need  
other ranges or gas types, you need to specify when ordering. According to the
customer's specific requirements, the flow meter of the corresponding gas type and
range can be selected.
B channel: 0～300SCCM N2 gas
C channel: 0～500SCCM Ar gas
measurement accuracy ±1.0%F.S
Pipe pressure   resistance 3MPa
Working pressure   difference 50～300KPa
Connecting pipe 304 stainless steel
Gas channel 304 stainless steel needle valve
Interface specification 1/4" ferrule connector for gas inlet and outlet
Exhaust system Mechanical pump Rotary vane pump
Pumping rate 1.1L/S   
Exhaust interface KF16
Vacuum measurement Resistance gauge
Ultimate vacuum 1.0E-1Pa
Power supply AC:220V 50/60Hz
Pumping interface KF16

Minimum Order: 1 sets

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