Carbon Tetrafluoride Adsorption Activated Carbon（HGF）

CF₄ Adsorption Activated Carbon is a high-performance adsorbent specially
engineered for the capture and recovery of carbon tetrafluoride (CF₄) in
semiconductor and microelectronics manufacturing processes.
With its highly developed pore structure and optimized surface chemistry, this
product enables efficient CF₄ removal from process exhaust gases, supporting
gas recycling, emission reduction, and cost control.
Pellet Activated Carbon is widely used in:
- Semiconductor fabrication plants
- Microelectronics manufacturing
- Fluorinated gas treatment systems
- Industrial gas recovery units

Click to Enlarge