High Purity Solvents

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High-purity solvents in semiconductor materials refer to chemical solvents that
have undergone rigorous purification and have extremely high purity. These
solvents are critical in the semiconductor manufacturing process because they
can effectively avoid impurities and contamination, thereby ensuring the
performance and reliability of electronic devices.



Characteristics of high-purity solvents
1. Extremely high purity: The purity of high-purity solvents is usually more
than 99.9%, and some even reach 99.999%. This high purity is achieved through
advanced technologies such as multiple distillations and filtrations to remove
any impurities that may affect the semiconductor manufacturing process.

2. Low impurity content: The content of metals and other impurities in these
solvents is extremely low, usually at the level of one billionth or one
trillionth. This is critical to avoiding defects in key steps such as wafer
cleaning, etching, deposition, and photolithography.



Application areas
Photolithography resist production: High-purity solvents are often used in the
preparation of photolithography resists, which is an important step in creating
complex patterns in semiconductor manufacturing.

Wet electronic chemicals: These solvents are also key ingredients in processes
such as wet etching, cleaning, and development, ensuring the accuracy and
stability of each manufacturing link.

Cooling systems: Certain high-purity solvents such as isobutane are also used
as coolants for electronic equipment, favored for their good thermal
conductivity and environmental friendliness.

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