multi arc ion plating coating machine for hard thin film

Multi-arc ion plating is the use of gas discharge or partial ionization of
evaporated substances, while gas ions or particles of evaporated substances are
bombarded, the evaporated substances or reactants are deposited on the substrate.
Ion plating combines the glow discharge, plasma technology and vacuum evaporation
organically, which not only significantly improves the film quality, but also
expands the application range of the film. It has the advantages of fast
evaporation rate, strong film adhesion, good diffraction, and extensive film
materials. It is very suitable for plating hard protective film such as TiN. At the
same time, because it can change the color of the film by controlling the
atmosphere, and the film is firmly combined with the substrate, it can also be used
to make decorative films of various colors

Features
This equipment is equipped with two multi-arc targets, which are placed on both
sides of the chamber. Cooperating with the planetary sample stage can effectively
improve the coating efficiency and improve the effect.
The coating instrument also adopts an integrated design, the chamber and the
electric control part are separated on the left and right, which realizes the
separation of water and electricity, and effectively guarantees the safety of
users.

Technical parameter
1. Model CY-MIOP500S-2TA
2. Vacuum chamber Water cooled stainless steel chamber;
φ500mm X 490mmH;
Front door type, φ 100 mm quartz observation window;
Built in two sets of infrared heating lamps, can be used for baking and degassing
the chamber;
Multiple CF interfaces are reserved for installation of multi-channel film
thickness meter
3. Gas system Mass flow meter:Ar gas 0~200sccm，N2 gas 0~200sccm
other flow or gas can be customized
4. Power supply AC 220V;50Hz;10kW
5. Control system 15“ touch screen configuration control software
6. Multi arc target
Quantity and SPEC 2-set;3inches
Installation method Chamber side, opposite
Working current 0~150A
Target thickness 50mm,min 20mm
7. Sample stage
Specification Planetary hanger
Number of samples There are 6 hanging points on each hanger, totally 6
hangers
Rotation speed Revolution speed 1~20rpm
8. Vacuum system
Model CY-GZK103-A
Molecular pump Turbo molecular pump
Backing pump Double stage rotary vane pump
Pumping molecular pump：6000L/S
Comprehensive pumping performance: 30 minutes vacuumdegree up to: 5×10E-3Pa
Rotary vane pump：1.1L/S
Ultimate vacuum 5×10E-4Pa
Extraction interface KF40
Exhaust interface KF16
vacuum measurement composite vacuum gauge

Minimum Order: 1 sets

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