Small two-in-one plasma sputter and thermal evaporation coating machine

The small plasma sputtering and evaporation two-in-one coating machine is equipped
with DC sputtering target and thermal evaporation assembly, which can not only be
used for metal film plating by plasma sputtering, but also obtain carbon or other
metal elemental films by vacuum thermal evaporation.

The instrument components are highly integrated, which realize two kinds of coating
functions in the same chamber. This coating machine adopts high purity quartz
chamber as vacuum chamber, and the coating process is completely visible.

The instrument is equipped with two stage rotary vane vacuum pump, which can
quickly reach the vacuum degree of 1.0E-1pa, and can meet the vacuum environment
required by most evaporation coating experiments and diode sputtering experiments.
This instrument has small size which can save space and can be used on the test
bench. One machine has multiple purposes, which is cost-effective and very suitable
for major universities and research institutions to choose.

Minimum Order: 1 sets

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