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Contact: iris zhang
Company: Zhengzhou CY Scientific Instrument Co., Ltd.
No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China
Zhengzhou 450000
China
Phone: +8637155199322
E-Mail: Send Inquiry Member for over 2 years
Date/Time:  1/28/21 9:02 GMT
 

box type two-channel MFC mass flowmeter for lab CVD

Two-channel mass flowmeter
This proportioner is suitable for low pressure and small flow, multiple gas
single/mixed continuous gas supply systems. It is especially convenient to switch a
variety of gases without causing the atmosphere to enter the heating tube.
The gas flow can be read on the same plane, and the digital display of the digital
tube is highlighted, and the appearance is beautiful and practical, and the
operation is simple.
The gas flow rate is accurate and the control accuracy is high, which can
effectively control the gas intake amount.
All inlet and outlet ports and valve connections are connected by unions for easy
maintenance and disassembly.

Working principle
The two (or more) kinds of gases in gas cylinder are decompressed through the
pressure reducing valve to the required pressure (0.05MPa~0.3Mpa) and input to the
gas mixing proportioner, and then by adjusting the volume flow of each component,
the mixed gas of the predetermined proportional relationship is output to achieve
the atmosphere required by the experiment. It is strictly forbidden to supply
hydrogen and oxygen at the same time to ensure safety.
The gas channel diagram is as follows:

Technical parameters
Valve type Flowmeter comes with solenoid valve
Number of gas channels 2 channels
Pressure range 0.05~0.3MPa
A-channel range Customized 0~1000 SCCM (H2)
B-channel range Customized 0~1000 SCCM (Ar)
Flow control range ±1.5%
Gas mixing tank volume 750mL
Gas channel material 304 stainless steel
Pipe interface 6.35mm ferrule connector
Power supply AC220V 50Hz

Minimum Order: 1 sets

box type two-channel MFC mass flowmeter for lab CVD
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