three-channel MFC gas mass flow meter for lab CVD

Cost effective Gas mass flowmeter for TN's CVD/PECVD/Graphene furnace to control
the gas flowing rate for different research purposes.

Feature
Variety gas way for option
304 stainless steel pipe core, corrosion resistance
Stainless steel double card quick connector, easy to connect, and no leakage

Application
1.Semiconductor manufacturing industry
2.Vacuum coating equipment
3.Special material surface treatment
4.Gas combustion control
5.Leakage detection system
6.Environment detection and analysis equipment
7.Chemical, petrochemical, metallurgy, optical fiber and etc

Technical parameter
Model CY-3Z
Gas channel 3-channel
Measuring unit Gas mass flowmeter
Measuring range A channel: 0～100SCCM H2 gas
B channel: 0～300SCCM N2 gas
C channel: 0～500SCCM Ar gas
measurement accuracy ±1.0%F.S
Pipe pressure resistance 3MPa
Working pressure 50～300KPa
Connecting pipe 304 stainless steel
Gas channel 304 stainless steel needle valve
Interface specification 1/4" ferrule connector for gas inlet and outlet
Remarks: If you need   other ranges or gas types, you need to specify when
ordering. According to the customer's specific requirements, the flow meter of the
corresponding gas type and range can be selected.

Minimum Order: 1 sets

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