customize pulsed laser sputtering deposition coating system

Customize pulsed laser sputtering deposition system
Pulsed laser deposition system, abbreviated as PLD system, this system consists of
two parts: excimer laser and vacuum coating chamber; vacuum coating chamber
consists of a sputtering vacuum chamber, a rotating target stage, an anti-oxidation
substrate heating stage, a working gas path, gas extraction system, installation
machine table, vacuum measurement and electrical control system.

1.Sputtering vacuum chamber
size spherical /Ф450mm.
Material high-quality stainless steel
It is welded by argon arc. The surface is polished by a special process. The
interface is sealed with a metal gasket or a fluorine rubber ring
2.Rotating target platform
target size(i) Φ60mm and (ii) Φ25mm
rotation speed Four targets can be loaded at a time
5~60 rpm, continuously adjustable,
target position revolution controlled by the motor-driven magnetic coupling
mechanism
target material shield The target material shield shields 4 targets, and only one
target material is sputtered into the film at a time, so as to avoid cross
contamination between the target materials
3.Antioxidant substrate heating table
substrate size φ2 ″ substrate can be placed;
heating temperature The maximum temperature is 800℃±1℃, controlled by
thermocouple closed-loop feedback, and the heater is made of antioxidant material.
mode of motion The substrate can rotate continuously, the speed is 5~60 rpm,
controlled by the motor-driven magnetic coupling mechanism
distance The distance between the substrate and the target platform is
adjustable from 30 to 90mm and controlled by a manual bellows adjustment mechanism
outside the chamber
others Manual control sample baffle components: 1 set;
Sample holder: 2;
4.Gas circuit system 2 channels
5.Laser beam scanning control system
Two-dimensional scanning mechanical platform, two sets of motor control, or manual
control;
6.Other configuration
Window and flange interface parts 1 set
gas pumping unit, valve, pipeline 1 set
1 set of machine mounting frame assembly :High quality square steel profile
welded, quick unloading coaming surface spray treatment; Machine surface with
stainless steel skin decoration; four casters can be fixed and movable
Vacuum measurement and electrical control system 1 set
Computer control system 1 set

Minimum Order: 1 sets

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