large-scale spin coater with PC control for DIA 300mm wafer

Intro
The CY-SPC12-HP large-scale spin coater adopts a high-power servo motor and a high-
precision driver to realize accurate spinning coating experiments on large-size
samples. It can support samples up to 300mm in diameter and 2.3mm in thickness. And
the speed resolution of the adopted high-precision drive can reach 0.2 rpm.
The chamber is made of stainless steel, which is beautiful and easy to clean, and
has a locking device. After loading the sample, the chamber can be locked to
prevent the sample from flying out in the event of an accident, which can
effectively protect the user. In addition, the chamber has a built-in glue outlet
for easy collection of waste liquid.

Technical parameter
Model CY-SPC12-HP
Chamber Stainless steel;
Support a diameter of 300mm and a thickness of 2.3mm;
Built-in glue outlet
Spinning speed ≤3000rpm
Speed resolution 0.2rpm
Control mode 15 inch full HD touch screen with USB port upgrade program
Power supply AC220V 50Hz 2kW
Vacuum pump oilless vacuum pump，pumping120L/min
Vacuum interface KF16

Minimum Order: 1 sets

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