high vacuum mini tubular CVD machine with molecular pump

This set CVD equipment is a miniaturized CVD system, the core of which is a mini
tube furnace, which uses resistance wire heating, and the maximum temperature of
the equipment can reach 1200°C. The instrument also contains a three-channel float
flow meter and a molecular pump set, which respectively constitute the inlet and
outlet gas parts of the CVD. There is a digital display vacuum gauge on the right
side of the furnace tube to control the vacuum degree and atmosphere environment
inside the furnace tube. The system adopts PID intelligent temperature control, and
the temperature control accuracy can reach ±1℃.
The tube furnace adopts temperature control meter operation in operation, can
preset the temperature control curve, one-button start and stop, easy to use, can
simplify the experiment operation and save the experiment time. The high-vacuum
molecular pump group can effectively increase the background vacuum and improve the
quality of the reaction product.

Technical parameters:
1. 1200℃ mini-tube furnace parameters
Supply voltage AC220V, 50Hz
Maximum power 2KW
Heating zone Single heating zone 200mm
Constant temperature zone head 100mm
Heating element Heat-resistant alloy wire
Thermocouple K type
Operating temperature ≤1150℃
Heating rate Suggest ≤10℃/min
Temperature control accuracy ±1℃
Temperature control method AI-PID 30-segment process curve, with overheat and
thermocouple failure protection
Furnace tube material High purity quartz
Furnace tube size φ50mm O.D x 450mm L
Vacuum pump Mechanical pump pumping speed 1.1L/s
Ultimate vacuum 5Pa

2. Three-channel float flowmeter parameters
Valve type Stainless steel needle valve
Number of gas paths Three
Pressure range 0.05~0.3MPa
Range 160 SCCM (Air)
Mixing tank volume 750mL
Gas path material 304 stainless steel
Pipe interface 6.35mm ferrule connector

3. Molecular pump parameters
Product number CY-GZK103-A
Molecular pump Turbomolecular pump
Backing pump Two-stage rotary vane pump
Pumping rate Molecular pump: 6000L/S
Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa
Rotary vane pump: 1.1L/S
Ultimate vacuum 5×10E-4Pa
Pumping port KF40
Exhaust interface KF16
Vacuum measurement Compound vacuum gauge

Minimum Order: 1 sets

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