roll to roll plasma enhanced chemical vapor deposition device

PECVD with roll to roll systemis a plasma enhanced chemical vapor deposition device
(PECVD) equipped with a roll-to-roll movement system. It is not only used in the
continuous heat treatment process of wire rod, such as the preparation of carbon
fiber, the modification of alloy and other materials wire rod, but also used for
the continuous growth of graphene on the coil.
The equipment is composed of five parts: a roll-to-roll movement system, 1200℃2-
heating-zone open tube furnace, PE plasma enhancement system, vacuum system and
three-way proton flowmeter gas supply system. The whole system can work in the
vacuum / atmosphere protection environment.
The speed of the winding device can be adjusted from 1 to 400mm / min, and the
mechanism adopts feedback adjustment, which can automatically correct the speed
deviation and ensure the speed stability of the sample, thus ensuring the accuracy
of the experiment.. 

Technical parameter:
1. 1200℃2-heating-zone open tube furnace
Voltage AC220V,50Hz
Max power 3KW
Heating zone Dual zones 200mm+200mm
Working temperature ≤1200℃
Temperature control accuracy ±1℃
Temperature control method AI-PID 30-stage process curve, can store multiple
Tube material High purity quartz
Tube size φ80mm I.D x 1400mm L
Sealing mode Stainless steel vacuum flange
Vacuum measurement Resistance gauge
Working gas Non-corrosive gases such as hydrogen, nitrogen, argon, and oxygen
Vacuum pump Bipolar rotary vane vacuum pump
Ultimate vacuum 10^-1Pa

2.Three-way mass flowmeter
Valve type Stainless steel needle valve
Gas channels Three-way
Pressure range 0.05~0.3MPa
Range 0~100 SCCM (Ar);0~200 SCCM(H2);0~500 SCCM(CH4)
Flow control range ±1.5%
Mixing tank volume 750mL
Gas path material 304 stainless steel
Pipe interface 6.35mm Bite type joint
Power supply AC220V 50Hz

3.RF power
Output Power 500W
Output accuracy ±1%
RF frequency 13.56MHz
RF stability ±0.005%
Cooling method Water cooling

Minimum Order: 1 sets

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