Single heating zone rotary plasma CVD reactor with vacuum automatic feeder

Single heating zone rotary plasma CVD reactor with vacuum automatic feeder

Single heating zone rotary PECVD, equipped with vacuum automatic feeder, and KF40
interface reserved at the end of the furnace tube can be connected to the receiving
tank. The feeder adopts screw feeding, the powder can be fed into the furnace tube
at a rated rate, and the feeding rate can be changed by adjusting the rotary speed.
It can realize the continuous coating and modification of powder materials by PECVD
method under the atmosphere protection environment. The receiving tank can collect
the processed powder under the atmosphere protection environment.
The equipment is equipped with 100W RF power at 13.56MHz. It can generate plasma in
vacuum. High-energy plasma can activate the sample surface, effectively enhance the
reaction effect and increase the reaction rate. This auxiliary method is widely
used in scientific experiments such as graphene preparation and particle coating.
This equipment is especially suitable for granular sample experiments. Through
mechanical transmission, it can control the continuous rotation of the working tube
360° with adjustable rotation speed, so that the materials in the tube are
continuously stirred and mixed, and fully contact with the gas and plasma, so that
the reaction of the sample is more uniform and stable.

Technical parameters：
1. RF power supply
Output Power 150W
Output accuracy ±1%
RF frequency 13.56MHz
RF stability ±0.005%
Cooling method Air-cooling

2. 1200℃ Single heating zone tube furnace
Supply voltage AC220V，50Hz
Maximum power 2KW
Heating zone Single heating zone 200mm
Working temperature Maximum 1200 ℃, continuous operating temperature should be
≤1100 ℃
Temperature accuracy ± 1 ℃
Temperature control method AI-PID 30-stage process curve, can store multiple

3. Three temperature zone independent control, with overheat and thermocouple
failure protection
Furnace tube material High purity quartz
Furnace tube size Dia. 50x800mm
Sealing method Vacuum stainless steel flange, KF16 flange
Adjustable speed 0-20rpm
Tilt Angle 0-15°
Vacuum pump Rotary vane mechanical pump
Ultimate vacuum 1.0E-1Pa
Feeding method Vacuum funnel and screw feed

Minimum Order: 1 sets

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